A translucent brown fluoropolymer compound reinforced with semi- crystalline perfluoropolymer nano-particles, specially developed to meet the demands of the semiconductor industry.

Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media.

Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivalled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications.

Key Attributes

• Good all round chemical and temperature resistance.

• Outstanding mechanical properties.

• Exceptional oxygen plasma resistance.

• Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems.

• Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications.

• High sealing conformity reduces surface permeation.

Typical Applications
Designed for use in semiconductor applications, including:

• NW and KF flange fittings

• Dry plasma etch

• Wet etch (acid based)

• Dry ashing

• Oxidation/diffusion

• Lithography

• Static seals: O-rings, body seals, cathode seals

• Gaskets