A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning.

Perlast® G67P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivalled purity and chemical resistance.

Perlast® G67P has a significantly lower compressive modulus than traditional perfluoroelastomers, making it highly compliant. So for a given compression, it exhibits a low reaction force, this results in lower stress on the seal, which leads to longer life expectancy.

Key Attributes

• Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems.

• Excellent chemical and temperature resistance.

• Excellent mechanical properties.

• Extremely low out-gassing properties making it ideal for vacuum sealing applications.

• High sealing efficiency.

• High material compliance reduces surface permeation.

• Reduced first wafer effect.

• Lower cost of ownership.

Typical Applications

• Dynamic seals

• Static seals

• Wafer-handling products